Micromachined Electrochemical cell platform for biosensors
نویسندگان
چکیده
Miniaturized Electrochemical cell platforms are developed using two different approaches, namely surface and bulk micromachining technologies. Gold is used as the working electrode layer in both cases. In bulk micromachined device, electrodes are formed in the cavity created on silicon using KOH etching process while the cavity is formed using SU -8 epoxy photoresist on top of the electrodes in the micromachined device. Cyclic voltammetry is carried out on both the devices using potassium ferrocyanide K4(Fe(CN)6) and potassium ferricyanide K3(Fe(CN)6) redox couple as the analyte. It is observed that the surface micromachined device yields reversible electrochemical response and is easily amenable for fabrication. Further, it is compatible for functionalization of the electrode surface for electrochemical biosensor applications.
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